PURPOSE: To increase a driving capacity by reducing the thicknesses of a part of a channel region in contact with an element isolator and a field oxide film near the part smaller than that of the other part, and extending the junction of a source or a drain to the end of a channel width direction.
CONSTITUTION: This element is a field effect element in which two sources/ drains 4 and a channel region 12 between them are induced by applying a voltage to a gate electrode 3 between two source/drain 4. A gate oxide film 10 is formed between the electrode 3 and a substrate. A leading electrode 13 is extended from the source/drain 4 to a first field oxide film 2, and connected to wirings through a contact hole 8 on the film 2. The film 10 is specified in the lateral direction of a channel region by a second field oxide film 5 to become an effective channel region. A field oxide film has thicknesses of two stages. Since the side of the channel region is specified by the film 5, a reduction in the channel width due to bird's beak, etc., can be prevented, and a wide channel width can be obtained.
MINAMI MASATAKA
YADORI SHOJI
