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Title:
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPS61112372
Kind Code:
A
Abstract:

PURPOSE: To implement high speed and high degree of integration of an element, by providing a wiring, whose outer size is larger than an opening part at the opening part in an embedded contact forming part through an insulating film.

CONSTITUTION: A semiconductor pattern 32 is provided on sapphire 31. A wiring 39, whose outer size is larger than an opening part 35, is provided at the opening part 35 in an embedded contact forming part B of the semiconductor pattern 32 through an oxide film 33'. In this semiconductor device, the wiring 39 and a drain region 42 are electrically connected through an N+ type impurity layers 36 in the embedded contact forming part B. Therefore, the electric resistance in the embedded contact forming part B can be suppressed to the very low value.


Inventors:
MATSUMURA HOMARE
Application Number:
JP23462684A
Publication Date:
May 30, 1986
Filing Date:
November 07, 1984
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L29/78; H01L21/28; H01L27/12; H01L29/786; (IPC1-7): H01L27/12; H01L29/44; H01L29/78
Attorney, Agent or Firm:
Takehiko Suzue



 
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