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Title:
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPS63193564
Kind Code:
A
Abstract:

PURPOSE: To obtain a bipolar transistor characterized by a small area and a high gain, by controlling the amount of boron diffusion, and making the impurity concentration of an N-type impurity diffused region and N-type silicon higher than the impurity concentration of P-type silicon.

CONSTITUTION: An N-type diffused region 304, in which arsenic or antimony is diffused, and silicon dioxide films 302 and 303 having different thicknesses are formed on a P-type silicon crystal substrate 301. Boron ions are implanted into an opening part. Then, an N-type epitaxial crystal film is formed. N-type silicon 306, P-type silicon 307 and N-type silicon 308 are formed by the impurity diffusion from an N-type diffused region 305 in epitaxial growing and heat treatment. Then, the N-type silicon 308 becomes 308' and a polysilicon film 309 becomes 309, by a selective polishing method. An element-isolating insulating film 312 is formed by an element isolating technology. P-type high impurity concentration silicon 310 and N-type high impurity concentration silicon 311 for contacts are formed by impurity diffusion.


Inventors:
TERADA KAZUO
TAKESHIMA TOSHIO
Application Number:
JP2584087A
Publication Date:
August 10, 1988
Filing Date:
February 05, 1987
Export Citation:
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Assignee:
NEC CORP
International Classes:
G11C11/416; G11C11/34; H01L21/331; H01L27/10; H01L29/72; H01L29/73; (IPC1-7): G11C11/34; H01L27/10; H01L29/72
Domestic Patent References:
JPS52103971A1977-08-31
JPS60211978A1985-10-24
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)