Title:
SEMICONDUCTOR DEVICE TESTER
Document Type and Number:
Japanese Patent JP3107798
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a semiconductor device tester which can simply control data on the use history of a probe card and moreover, has a low cost for the control.
SOLUTION: A semiconductor device tester is provided with a memory module 12 provided on a probe card 4 and a communication means for sending data communications between the module 12 and a prober 13. Here the module 12 is provided with a communication circuit 14, a nonvolatile memory 13 for memorizing data inputted via the circuit 14, and an inductor 15. The above communication means consists of the circuit 14, and a communication port 16 provided on the prober 3, the inductance 15 actuates the circuit 14 by an induced electromotive force, which is generated by external electric waves, and the data communications are made possible between the circuit 14 and the port 16 in the contactless state.
Inventors:
Takeshi Doi
Shinichiro Kimura
Shinichiro Kimura
Application Number:
JP25381099A
Publication Date:
November 13, 2000
Filing Date:
September 08, 1999
Export Citation:
Assignee:
Innotech Co., Ltd.
International Classes:
G01R31/26; H01L21/66; (IPC1-7): H01L21/66; G01R31/26
Domestic Patent References:
| JP5297021A | ||||
| JP4276890A | ||||
| JP229723B2 |
Attorney, Agent or Firm:
Nobuyuki Shima