Title:
半導体装置
Document Type and Number:
Japanese Patent JP4513440
Kind Code:
B2
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Inventors:
Asada Koji
Junpei Morimoto
Takayuki Matsumoto
Shinichi Maebu
Junpei Morimoto
Takayuki Matsumoto
Shinichi Maebu
Application Number:
JP2004209153A
Publication Date:
July 28, 2010
Filing Date:
July 15, 2004
Export Citation:
Assignee:
Sumitomo Bakelite Co., Ltd.
International Classes:
H01L21/60; H01L23/29; H01L23/31
Domestic Patent References:
| JP9275119A | ||||
| JP10233408A | ||||
| JP6112259A | ||||
| JP6112253A | ||||
| JP6112256A | ||||
| JP6112251A | ||||
| JP2215140A | ||||
| JP2000022050A | ||||
| JP52119067A | ||||
| JP63052452A | ||||
| JP10303239A | ||||
| JP7335684A | ||||
| JP7335686A | ||||
| JP2003059964A | ||||
| JP2003023030A | ||||
| JP2003023029A | ||||
| JP2001345342A | ||||
| JP2000357706A | ||||
| JP2000144282A | ||||
| JP11214425A | ||||
| JP2251155A | ||||
| JP9272930A | ||||
| JP8293516A | ||||
| JP8291348A | ||||
| JP8088242A | ||||
| JP2000040710A | ||||
| JP10303235A | ||||
| JP10233410A | ||||
| JP8109425A | ||||
| JP56115544A | ||||
| JP2002076051A |
Foreign References:
| WO1994024322A1 |