Title:
Semiconductor device
Document Type and Number:
Japanese Patent JP6082562
Kind Code:
B2
Inventors:
Tatsuya Honda
Masashi Tsubuki
Yusuke Nonaka
Takashi Shimazu
Masashi Tsubuki
Yusuke Nonaka
Takashi Shimazu
Application Number:
JP2012226820A
Publication Date:
February 15, 2017
Filing Date:
October 12, 2012
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
H01L29/786; H01L21/316; H01L21/336
Domestic Patent References:
| JP2010186994A | ||||
| JP2011142315A | ||||
| JP2010525602A |
Foreign References:
| WO2011126093A1 |