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Patent Searching and Data


Title:
SEMICONDUCTOR INTEGRATED CIRCUIT
Document Type and Number:
Japanese Patent JP2010034407
Kind Code:
A
Abstract:

To provide a semiconductor integrated circuit having a power wiring structure improving wiring efficiency by reducing congestion of wiring.

Between a main power wiring layer and an intermediate power wiring layer, a first intermediate connection via connecting first main power wiring to first intermediate power wiring is formed at a position overlapping the first main power wiring, and a second intermediate connection via connecting second main power wiring to second intermediate power wiring is formed at a position overlapping the second main power wiring. Between the intermediate power wiring layer and an auxiliary power wiring layer, a plurality of first auxiliary connection vias connecting the first intermediate power wiring to first auxiliary power wiring and a plurality of second connection vias connecting the second intermediate power wiring to second auxiliary power wiring are arranged in the first direction, and a plurality of auxiliary connection via lines are arranged in the second direction. The second intermediate power wiring of the intermediate power wiring layer includes connection wiring connecting the second intermediate connection vias to the second auxiliary connection vias.


Inventors:
KANEKO SEIJITSU
NAKAJIMA TAKESHI
Application Number:
JP2008196632A
Publication Date:
February 12, 2010
Filing Date:
July 30, 2008
Export Citation:
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Assignee:
KAWASAKI MICROELECTRONICS INC
International Classes:
H01L21/82; H01L21/3205; H01L21/822; H01L23/52; H01L27/04
Attorney, Agent or Firm:
Nozomi Watanabe
Haruko Sanwa