To prevent the occurrence of a trouble caused by the slippage or lifting of a cassette by securely locking the cassette.

A semiconductor manufacturing apparatus is provided with a cassette loading table that receives and sends a cassette 16, a cassette loader that transfers the cassette to and from the cassette loading table, and a wafer loader that transfers a wafer from and to the cassette loaded on the cassette loader. The cassette loading table comprises a cassette loading plate 28 on which the cassette is loaded, a roller holder 33 arranged freely movable with respect to the cassette loading plate, and a locking roller 42 arranged on the roller holder. The cassette has a hook 38 at the bottom. By relatively moving the roller holder with respect to the cassette loading plate, the locking roller is elastically so deformed as to press the cassette to the cassette loading plate and is engaged in the hook.