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Title:
SEMICONDUCTOR MEMORY STORAGE DEVICE
Document Type and Number:
Japanese Patent JPS5683060
Kind Code:
A
Abstract:

PURPOSE: To obtain a device, the quantity of reading signals thereof is much and an area of a dynamic memory cell thereof is not so much large, by a method wherein one of two MOSFETs forming the dynamic memory cell is made up by using a polycrystal semiconductor film.

CONSTITUTION: In an MOSFET1, a polycrystal Si film 11 formed on a P type Si substrate through a gate insulating film is used as a gate electrode, and an N+ type source 12 and a drain 13 are built up employing the polycrystal Si film 11 as a mask. An MOSFET2 with a source, a drain and a channel is made up on the extension of the polycrystal Si 11. A gate electrode of the MOSFET2 is formed by an N+ type layer 14 diffused and formed in the substrate, a bit line BL and a writing word line WLW are made up by the second layer polycrystal Si layer, and Al is evaporated through an insulating film and a bit line BL' and a reading word line WLR are built up.


Inventors:
FURUYAMA TOORU
Application Number:
JP16052279A
Publication Date:
July 07, 1981
Filing Date:
December 11, 1979
Export Citation:
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Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G11C11/404; G11C11/405; H01L21/8234; H01L21/8242; H01L27/088; H01L27/10; H01L27/108; H01L29/04; H01L29/08; H01L29/78; (IPC1-7): G11C11/34; H01L27/10; H01L29/78



 
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