Title:
SEMICONDUCTOR MOUNTING EQUIPMENT
Document Type and Number:
Japanese Patent JP3262683
Kind Code:
B2
Abstract:
PURPOSE: To detect the abutting of a semiconductor element against a circuit board and interrupt it, by controlling the operation of a voice coil motor, on the basis of position detection data and a counterelectromotive force of the voice coil motor which is generated when the semiconductor element comes into contact with the circuit board.
CONSTITUTION: A driving current superposed on a base current for canceling the self weight of a pressing shaft 2 and a suction means 7 is made to flow in a VCM 3. The pressing shaft 2 is moved up and down by the electromagnetic force generated by the driving current. The pressing shaft ascends or discends by changing the direction of the driving current. When resistance exists in the movement of the pressing shaft 2, a counterelectromotive force is generated in the VCM 3. The instance when a semiconductor element sucked and retained by the sucking means 7 fixed to the lower end of the pressing shaft 2 abuts against a circuit board 8 for mounting is detected with the counterelectromotive force, and the VCM 3 is interrupted. Thereby the semiconductor element can be stably mounted.
Inventors:
Satoshi Shida
Akira Kabeshita
Shinji Kanayama
Kenji Takahashi
Makoto Imanishi
Akira Kabeshita
Shinji Kanayama
Kenji Takahashi
Makoto Imanishi
Application Number:
JP752495A
Publication Date:
March 04, 2002
Filing Date:
January 20, 1995
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L21/607; H01L21/52; H01L21/60; (IPC1-7): H01L21/52; H01L21/60
Domestic Patent References:
| JP1112738A | ||||
| JP5131386A | ||||
| JP669686A | ||||
| JP6177180A |
Attorney, Agent or Firm:
Masaru Ishihara
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