Title:
SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPH0778887
Kind Code:
A
Abstract:
PURPOSE: To provide a high-reliability semiconductor storage device, which has a large capacitance and is superior in soft error resistance.
CONSTITUTION: A semiconductor storage device comprises a transistor, formed on a semiconductor substrate 1, a storage electrode 25 connected to this transistor and at the same time having a fin with a drooped part 25a formed on its point part, a dielectric film 26 formed on both sides of the inside and outside of this electrodes 25, and a cell plate 27 covering this film 26.
Inventors:
OGIWARA HIDETOSHI
Application Number:
JP22326393A
Publication Date:
March 20, 1995
Filing Date:
September 08, 1993
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
H01L27/04; H01L21/822; H01L21/8242; H01L27/10; H01L27/108; (IPC1-7): H01L21/8242; H01L27/108; H01L27/04; H01L21/822
Attorney, Agent or Firm:
Mamoru Shimizu (1 person outside)
Next Patent: トラッキングサーボ装置