Title:
SEMICONDUCTOR SWITCH
Document Type and Number:
Japanese Patent JP2000188501
Kind Code:
A
Abstract:
To provide a semiconductor switch that is inspected by using only a general-purpose RF probe at a reduced inspection cost because the RF probe is hardly defected.
A connection pad 9 acting as an RF input or output terminal is connected to a microstrip line 11 with a MIM capacitor 10 inbetween and a bypass line 12 to bypass the MIM capacitor 10 is formed and connected to the microstrip line 11. When an on-wafer check is finished, the bypass line 12 is cut off.
Inventors:
TSUKAHARA YOSHIHIRO
SASAKI YOSHINOBU
KATO TAKAYUKI
SASAKI YOSHINOBU
KATO TAKAYUKI
Application Number:
JP36429398A
Publication Date:
July 04, 2000
Filing Date:
December 22, 1998
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01P1/15; (IPC1-7): H01P1/15
Domestic Patent References:
JPH0634715A | 1994-02-10 | |||
JPH06237122A | 1994-08-23 | |||
JPH05343489A | 1993-12-24 | |||
JPH0677327A | 1994-03-18 |
Attorney, Agent or Firm:
Aoyama Ryo (1 person outside)
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