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Title:
SENSOR AND STRUCTURE
Document Type and Number:
Japanese Patent JP2016017760
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a sensor and a structure excellent in detection sensitivity to nonanal.SOLUTION: In a sensor 100, metal electrodes 120A and 120B are formed on a substrate 110, and a structure 130 is formed on the substrate 110 where the metal electrodes 120A and 120B are formed. In the structure 130, a nanocrystal 130b of tin oxide exists on the surface of an aggregate 130a of nanoparticles, and the aggregate 130a of nanoparticles contains nanoparticles 131a of tin oxide and nanoparticles 132a of a noble metal.SELECTED DRAWING: Figure 1

Inventors:
MASUDA YOSHITAKE
ITO TOSHIO
SHIN USOKU
KATO KAZUMI
Application Number:
JP2014138669A
Publication Date:
February 01, 2016
Filing Date:
July 04, 2014
Export Citation:
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Assignee:
NAT INST OF ADVANCED IND SCIEN
International Classes:
G01N27/12; B82Y5/00; B82Y15/00; B82Y40/00
Domestic Patent References:
JP2010032343A2010-02-12
JP2010032343A2010-02-12
JP2009117287A2009-05-28
JP2008064674A2008-03-21
JP2008020411A2008-01-31
JP2009117287A2009-05-28
JP2008064674A2008-03-21
JP2008020411A2008-01-31
Foreign References:
US20100098593A12010-04-22
US20100098593A12010-04-22
Other References:
C.LIEWHIRAN ET AL.: "Ultra-sensitive H2 sensors based on flame-spray-made Pd-loaded SnO2 sensing films", SENSORS AND ACTUATORS B:CHEMICAL, vol. Vol.176, JPN6018015045, 2013, pages 893 - 905
TETSUYA KIDA(外4名): "Deposition of Pd onto SnO2 nanoparticles-based gas sensors using a Pd complex as the precursor", ADVANCED MATERIALS RESEARCH, vol. Vols. 47-50, JPN6012041466, 12 June 2008 (2008-06-12), pages p. 1506-1509
ITOH TOSHIO ET AL.: "Nonanal gas sensing properties of platinum, palladium, and gold-loaded tin oxide VOCs sensors", SENSORS AND ACTUATORS B:CHEMICAL, vol. Vol.187, JPN6018015048, 2013, pages 135 - 141
C.LIEWHIRAN ET AL.: "Ultra-sensitive H2 sensors based on flame-spray-made Pd-loaded SnO2 sensing films", SENSORS AND ACTUATORS B:CHEMICAL, vol. Vol.176, JPN6018015045, 2013, pages 893 - 905
TETSUYA KIDA(外4名): "Deposition of Pd onto SnO2 nanoparticles-based gas sensors using a Pd complex as the precursor", ADVANCED MATERIALS RESEARCH, vol. Vols. 47-50, JPN6012041466, 12 June 2008 (2008-06-12), pages p. 1506-1509
ITOH TOSHIO ET AL.: "Nonanal gas sensing properties of platinum, palladium, and gold-loaded tin oxide VOCs sensors", SENSORS AND ACTUATORS B:CHEMICAL, vol. Vol.187, JPN6018015048, 2013, pages 135 - 141
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito