Title:
SETTING DEVICE OF TARGET
Document Type and Number:
Japanese Patent JPS5261698
Kind Code:
A
Abstract:
PURPOSE: To set a target for generating plasma at a predetermined position with high precision and efficiency by means of attaching a rotation disk to a vacuum tub, the disk thereat a driving means by three axial directions of the co-ordinates being set combined with plural number of targets supporting mechanisms for vacuum leakage counterplan.
Inventors:
MURATA NOBORU
Application Number:
JP13774775A
Publication Date:
May 21, 1977
Filing Date:
November 18, 1975
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
G21K5/08; G21B1/00; G21B1/03; H05B7/18; (IPC1-7): G21B1/00
Domestic Patent References:
| JP41018398A |