Title:
シャドーフレームサポート
Document Type and Number:
Japanese Patent JP6660971
Kind Code:
B2
Abstract:
The present invention generally provides a processing chamber having shadow frame supports that direct cleaning gas flow to the corners of the chamber. The shadow frame supports are disposed along part of the chamber walls, thus leaving the corners unoccupied. During cleaning, the shadow frame is disposed in a way that it rests on both the substrate support and the shadow frame supports. Therefore, the cleaning gas flowing along the chamber walls is blocked by the shadow frame supports and the cleaning gas is forced to the corners since the shadow frame supports do not extend to the corners.
Inventors:
Kengo Ohashi
Takao Hashimoto
Shinobu Abe
Takao Hashimoto
Shinobu Abe
Application Number:
JP2018040568A
Publication Date:
March 11, 2020
Filing Date:
March 07, 2018
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/31; C23C16/44; C23C16/50; H01L21/3065
Domestic Patent References:
| JP5156455A | ||||
| JP2004111983A | ||||
| JP2010016021A | ||||
| JP2011228546A | ||||
| JP2012505313A | ||||
| JP2012517076A | ||||
| JP2010520370A | ||||
| JP2006121073A |
Foreign References:
| US20030029473 | ||||
| US20100311249 | ||||
| US20110146577 |
Attorney, Agent or Firm:
Yoshiaki Anzai