Title:
シート貼付装置及び貼付方法、並びに、シート製造装置及び製造方法
Document Type and Number:
Japanese Patent JP5789463
Kind Code:
B2
Inventors:
Yoshiaki Sugishita
Application Number:
JP2011211956A
Publication Date:
October 07, 2015
Filing Date:
September 28, 2011
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
B65H35/08; H01L21/683
Domestic Patent References:
| JP201371809A | ||||
| JP201374098A | ||||
| JP201374103A | ||||
| JP201374100A | ||||
| JP201374099A | ||||
| JP2007165363A | ||||
| JP2011114270A | ||||
| JP2009298471A |
Attorney, Agent or Firm:
Yoshio Yamaguchi