PURPOSE: To attain the smooth and accurate shift of a disk substrate with no generation of injuries and wear dust, by setting the disk substrate with no contact with a clamping tool when the disk substrate is shifted to the clamping tool from a disk handler.

CONSTITUTION: When a disk device 2 is shifted from a working device to another one, the outer circumferential surface of the substrate 2 is held by a chuck member 3. Under such conditions, a disk handler 1 is carried to a position near a rotary table 2 by means of a proper carrying means. Here the positioning state between the substrate 2 set to the handler 1 and a clamping tool 23 by a position sensor 24. Then the horizontal and vertical feed devices 15 and 18 are driven by the detecting signal of the sensor 24. Thus the center control is secured completely between both devices 15 and 18. Then the handler 1 moved more to fit the substrate 2 at a tip loading part 23a of the tool 23 with no contact with the tool 23.