Title:
SHOWER HEAD AND PLASMA PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP2023002168
Kind Code:
A
Abstract:
To provide a technique of preventing an abnormal discharge generated in an inner part of a shower head.SOLUTION: A shower head for supplying a processing gas to an inner part of a processing chamber, comprises: a cooling plate that has a gas diffusion chamber and a plurality of first penetration holes that is penetrated from the gas diffusion chamber to a first surface on the processing chamber side, and in which the processing gas flows; an upper electrode that includes a second surface that is contacted to the first surface of the cooling plate, and a third surface that forms an inner surface of the processing chamber, and includes a plurality of second penetration holes that is penetrated from the second surface to the third surface; and a plurality of concave parts that is formed on the first or second surface, and is provided so as to be separated each other. Any one of the plurality of first penetration holes is connected via at least two second penetration holes of the plurality of second penetration holes and any one of the plurality of concave parts.SELECTED DRAWING: Figure 2
Inventors:
HIROSE HISASHI
TSUJIMOTO HIROSHI
UJIIE TOMOYA
TSUJIMOTO HIROSHI
UJIIE TOMOYA
Application Number:
JP2021103225A
Publication Date:
January 10, 2023
Filing Date:
June 22, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
C23C16/455; H01L21/3065; H01L21/205
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito