To provide a single crystal manufacturing apparatus capable of suitably enhancing weight detection accuracy.
A single crystal manufacturing apparatus 101 includes an airtight container 200, a pulling shaft 310, an upper support part 400, and upper weight detection means 800. The upper support part 400 includes an upper direct support part 410 for directly supporting the pulling shaft 310, a spring 451 whose one end is attached to the upper direct support part 410 and an upper indirect support part 430 to which the other end of the spring 451 is attached and which bears the weight of the pulling shaft 310 through the spring 451. The upper weight detection means 800 includes a low-load load cell 810 arranged between the upper direct support part 410 and the upper indirect support part 430 and capable of detecting compression force which is reduced when the upper direct support part 410 is descended against the upper indirect support part 430. The low-load load cell 810 detects the initial weight and starts pulling of the pulling shaft 310 to make a single crystal 110 grow in a state that the spring 451 bears the initial weight and the weight of the pulling shaft 310.
Tatsuya Tanaka
Tsukasa Senba
Yasumitsu Suzuki
Nao Usui