Title:
単結晶基板製造方法および内部改質層形成単結晶部材
Document Type and Number:
Japanese Patent JP5875122
Kind Code:
B2
Abstract:
The present invention addresses the problem of providing a monocrystalline substrate production method capable of easily producing a relatively large and thin monocrystalline substrate, and a monocrystalline member with a modified layer formed therein. This method comprises: a step for arranging a laser condensing means upon a monocrystalline member in a non-contact state; a step for irradiating, with a laser beam, a surface (10t) of the monocrystalline member by means of the laser condensing means, and condensing the laser beam on the interior of the monocrystalline member; a step for moving the laser condensing means and monocrystalline member relative to each other, and forming a two-dimensional modified layer (12), created by a polycrystalline part parallel with the irradiating axis of the laser beam in the interior of the monocrystalline member; and a step for forming a monocrystalline substrate (10s) by detaching, from the interface with the modified layer (12), a monocrystalline layer (10u) formed as a result of segmentation by the modified layer (12).
Inventors:
Kokushi Yosuke
Hideki Suzuki
Rika Matsuo
Junichi Ikeno
Hideki Suzuki
Rika Matsuo
Junichi Ikeno
Application Number:
JP2012556741A
Publication Date:
March 02, 2016
Filing Date:
February 10, 2011
Export Citation:
Assignee:
Shin-Etsu Polymer Co., Ltd.
Saitama University
Saitama University
International Classes:
B23K26/38; B23K26/40; H01L21/304
Domestic Patent References:
| JPH09331077A | 1997-12-22 | |||
| JP2011003624A | 2011-01-06 | |||
| JP2007142000A | 2007-06-07 |
Foreign References:
| WO2010064997A1 | 2010-06-10 | |||
| WO2010064997A1 | 2010-06-10 |
Attorney, Agent or Firm:
Hidekazu Miyoshi