PURPOSE: To prevent the error generated by dust and to execute recording and reproducing with high reliability by providing the thin-film magnetic head with the slider randomly arranged with many microrecessed parts capable of housing plural pieces of the microdust on a magnetic disk surface.
CONSTITUTION: A protective film 2 is formed by sputtering on a substrate 1 and a carbon film 3 to serve as a mask is formed thereon. The film 3 is so formed that the many coarse particles 7 are randomly formed within the film 3. After a photoresist 4 is applied on the film 3, the patterns of slider grooves 6 are formed by etching. The photoresist 4 is then removed and the film 2 and the substrate 1 are worked by ion milling with the film 3 as a mask, by which the slider 6 is formed. The microrecessed parts 8 having a diameter of 10 to 100m and depth of 10 to 5000nm meeting a difference in the removing speed at the time of the ion milling are formed on the rail 5 forming surface of the substrate 1 on which the coarse particles 7 exist simultaneously with the working. The remaining film 3 is then removed, by which the slider is formed.
HIYOSHI YASUO
NAKAMURA KEIICHI
HAGIWARA YOSHIKI
