Title:
Slit nozzle cleaning equipment and an application device for works
Document Type and Number:
Japanese Patent JP6251062
Kind Code:
B2
Inventors:
Yoshinori Igawa
Application Number:
JP2014015065A
Publication Date:
December 20, 2017
Filing Date:
January 30, 2014
Export Citation:
Assignee:
Tatsumo Co., Ltd.
International Classes:
H01L21/027; B05C5/02; B05C11/10; G02F1/13
Domestic Patent References:
| JP2012200614A | ||||
| JP2005270841A | ||||
| JP2011167612A | ||||
| JP9192566A | ||||
| JP2013215716A | ||||
| JP2004055607A | ||||
| JP2006261326A | ||||
| JP2014014784A |
Attorney, Agent or Firm:
Kaede International Patent Office
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