To provide a small multiaxis composite working machine capable of manufacturing a microchip having a micro channel, etc.
This small multiaxis composite working machine 10 has multiaxis XYZBC axes furnished with a rotary working table 12 placed on an X-Y axis stage and a tool stage 13 to move in accordance with the Z axis, to revolve around a tool head end and free to make the tool head end contact with a workpiece 29 at an optional angle and can manufacture the microchip having the micro channel, etc. by a unit of itself as it can selectively install a polishing mechanism to polish optional points by giving alternating current high voltage to functional fluid, a cutting work mechanism to carry out end milling and a nano forming mechanism to carry out fine plastic work on the tool stage.
KATO MASARU
MATSUMURA TAKASHI
YOSHINO MASAHIKO
Shinichi Fukuda
Takemichi Fukuda