Title:
固体撮像素子
Document Type and Number:
Japanese Patent JP7167114
Kind Code:
B2
Abstract:
A solid-state imaging device having a first area and a second area surrounding the first area is provided. The solid-state imaging device includes a substrate having a plurality of photoelectric conversion elements. The solid-state imaging device also includes a color filter layer disposed on the substrate. The color filter layer includes a plurality of color filter segments corresponding to the plurality of photoelectric conversion elements. The solid-state imaging device further includes an optical waveguide layer over the color filter layer. The optical waveguide layer includes a waveguide partition grid, a waveguide material in spaces of the waveguide partition grid, and an anti-reflection film on the waveguide partition grid and the waveguide material. The width of the top of the waveguide partition grid is larger than the width of the bottom of the waveguide partition grid.
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Inventors:
Hayashi
Application Number:
JP2020197265A
Publication Date:
November 08, 2022
Filing Date:
November 27, 2020
Export Citation:
Assignee:
VisEra Technologies Company Limited
International Classes:
H01L27/146
Domestic Patent References:
| JP2013510424A | ||||
| JP2011134788A | ||||
| JP200988450A |
Foreign References:
| WO2017073321A1 | ||||
| US20160027829 |
Attorney, Agent or Firm:
Eternal patent business corporation