Title:
SPECTRAL PHOTOMETER AND SPECTRAL PHOTOMETER SET
Document Type and Number:
Japanese Patent JP2023110651
Kind Code:
A
Abstract:
To provide a spectral photometer which is used for measuring the amounts of components in a process liquid on a rotating substrate, and with which it is possible to simultaneously measure optical intensities in a plurality of wavelengths.SOLUTION: Provided is a spectral photometer 26 comprising: a housing 46; an optical fiber connection part 47 which is disposed in the housing, and to which an optical fiber 28a for guiding light having passed through a process liquid to the inside of the housing is connected; collimating means 41 for collimating light radiated from the optical fiber to the inside of the housing into a bundle of parallel rays; a shielding member 42 which is disposed in the optical path of the bundle of parallel rays, and in which a plurality of openings 43 of the same area and of the same shape are formed rotationally symmetrically around the optical axis of the bundle of parallel rays; a bandpass filter 44 which closes each of the openings and allows light to pass through prescribed mutually different wavelength bands; and an optical detection element 45 for detecting the intensity of light having passed through each of the bandpass filters.SELECTED DRAWING: Figure 3
Inventors:
YASUDA NOBUYOSHI
FUKUMOTO TOMOYA
FUKUMOTO TOMOYA
Application Number:
JP2022012233A
Publication Date:
August 09, 2023
Filing Date:
January 28, 2022
Export Citation:
Assignee:
KURASHIKI BOSEKI KK
International Classes:
G01N21/3577; G01J3/26
Attorney, Agent or Firm:
Tetsuro Kawahara
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