Title:
反射防止膜用湿式現像性ポリマーバインダーとしてのスピン・ボウル適合性ポリアミック酸/イミド
Document Type and Number:
Japanese Patent JP4533744
Kind Code:
B2
Abstract:
Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers of the composition include recurring monomers having the formulas where: (1) each R is individually selected from the group consisting of hydrogen, —OH, aliphatics, and phenyls; and (2) L is selected from the group consisting of —SO2— and —CR′2—, where each R′ is individually selected from the group consisting of hydrogen, aliphatics, phenyls, and —CX3, where each X is individually selected from the group consisting of the halogens. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.
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Inventors:
Cox robert christian
Neil Charles Jay.
Neil Charles Jay.
Application Number:
JP2004515999A
Publication Date:
September 01, 2010
Filing Date:
June 18, 2003
Export Citation:
Assignee:
Brewer Science INC.
International Classes:
C08G73/10; G03F7/037; G02B1/11; G03F7/038; G03F7/09; G03F7/11; H01L21/027
Domestic Patent References:
| JP9078031A | ||||
| JP8012940A | ||||
| JP7014762A | ||||
| JP2002107938A |
Attorney, Agent or Firm:
Nozomi Watanabe
Haruko Sanwa
Haruko Sanwa