To ensure removal of foreign matter adhered to the surface of an article and flowing of the foreign matter out of the article in a spin washing apparatus which cleans an article to be cleaned by spraying a cleaning solution from a nozzle while causing the article to rotate.
A cleaning solution 7 sprayed by the nozzle 6 is applied to an article 3 in a linear form. To allow removed foreign matter to flow effectively out of the surface of the article 3, the spraying angle of the cleaning solution with respect to the article 3 is preferably 30-80°. To reduce the size of the nozzle 6, the nozzle is preferably moved so that, in the plane view, the linear cleaning area 8 for the cleaning solution 7 passes the center of rotation and the outer edge part of the article.
Shigeki Yamada
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