Title:
分割装置
Document Type and Number:
Japanese Patent JP6557131
Kind Code:
B2
Inventors:
Kunimoto Koichi
Shigeru Ishii
Shigeru Ishii
Application Number:
JP2015245438A
Publication Date:
August 07, 2019
Filing Date:
December 16, 2015
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B49/12
Domestic Patent References:
| JP2004186584A | ||||
| JP10284443A | ||||
| JP2007125667A | ||||
| JP2013065603A | ||||
| JP2015133375A | ||||
| JP2001023936A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Kojino Koji
Sachiko Okunuki
Kojino Koji