Title:
SPRAY DEVICE AND METHOD FOR CONTROLLING TEMPERATURE OF SPRAY LIQUID
Document Type and Number:
Japanese Patent JP3565443
Kind Code:
B2
Abstract:
PURPOSE: To control the temperature of spray liquid with high accuracy by providing a temperature controlling section which controls the temperature between a feed pipe and a spray head.
CONSTITUTION: A processing solution D1 pressurized by a compressed gas N2 from a pipe L9 is supplied to an spray head 4 through a temperature controller 103 and emitted through a nozzle 104N. The processing solution in the pipe L1 is adjusted to a prescribed temperature in the middle of the pipe L1 by means of the controller 103. The solution D1 is sprayed from the nozzle 104N in a state where a solenoid valve SVF is closed and another solenoid valve SVE is opened. Otherwise it is circulated to a recovery tank 102A or 102B through a pipe L2 in a state where the valve SVE is closed and the other valve SVF is opened.
Inventors:
Kazuaki Yamamoto
Application Number:
JP14405994A
Publication Date:
September 15, 2004
Filing Date:
June 03, 1994
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
G03F1/68; G03F1/80; G03F1/82; H01L21/027; (IPC1-7): H01L21/027; G03F1/08
Domestic Patent References:
| JP4330961A | ||||
| JP63244845A | ||||
| JP59046164A | ||||
| JP2017968A |
Attorney, Agent or Firm:
Satoshi Kanayama