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Patent Searching and Data


Title:
STABILIZED EMITTER AND METHOD OF STABILIZING EMITTER
Document Type and Number:
Japanese Patent JP2006269431
Kind Code:
A
Abstract:

To provide an emitter for a charged particle beam apparatus.

The emitter is provided with a filament (3) fixed to and extended between a first and a second support parts (2), an emitter tip part (4)mounted on the filament (3) and a stabilizing element (6) mounted on a third support part (5) and the filament (3). The first, second and third support parts (2, 5) define a triangle, and as a result, the stabilizing element (6) will be extended at least partially in the direction of crossing an extension direction of the filament at right angles.


Inventors:
ADAMEC PAVEL
LANIO STEFAN
Application Number:
JP2006079454A
Publication Date:
October 05, 2006
Filing Date:
March 22, 2006
Export Citation:
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Assignee:
INTEGRATED CIRCUIT TESTING
International Classes:
H01J37/06; H01J37/073
Attorney, Agent or Firm:
Yuichi Yamada
Masakazu Noda