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Title:
ステージ装置および荷電粒子ビーム描画装置
Document Type and Number:
Japanese Patent JP6559530
Kind Code:
B2
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Inventors:
Saifuji Hiroyasu
Seiichi Nakazawa
Keita Deno
Application Number:
JP2015200418A
Publication Date:
August 14, 2019
Filing Date:
October 08, 2015
Export Citation:
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Assignee:
New Flare Technology Co., Ltd.
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
JP2014049601A
JP2002057091A
JP2000294613A
JP2002222758A
JP2002261000A
Foreign References:
WO2008004306A1
Attorney, Agent or Firm:
Takeshi Sekine
Hirohito Katsunuma
Akaoka Akira



 
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