Title:
STANDARD LEAKAGE GENERATOR OF AMMONIA GAS
Document Type and Number:
Japanese Patent JPH09145554
Kind Code:
A
Abstract:
To set a leakage of ammonia gas arbitrarily by varying the set value of each regulator when the flow rate of ammonia gas and dilute gas is controlled using two precise gas flow rate regulators.
Ammonia gas to be measured and dilute gas of helium or nitrogen gas are regulated by a gas flow rate regulators 11, 12, respectively, to predetermined flow rates and then mixed through a gas mixer 21 before being taken out as a mixed gas of desired concentration. Pressure regulation valves 31, 32 reduce the pressure of supply gas to a constant level. Stop valves 41-51 block each gas flow in case of emergency. Check valves 51, 52 prevent counter flow of each gas. Pressure of mixture gas is finally regulated by a back pressure valve 61.
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Inventors:
OKAZAKI MASAHIKO
Application Number:
JP29973095A
Publication Date:
June 06, 1997
Filing Date:
November 17, 1995
Export Citation:
Assignee:
NEC CORP
International Classes:
G01N1/00; F28D15/02; G01M3/02; G01N30/04; (IPC1-7): G01N1/00; F28D15/02; G01M3/02; G01N30/04
Domestic Patent References:
| JPH0719767A | 1995-01-20 | |||
| JPH06130045A | 1994-05-13 | |||
| JPS5110415A | 1976-01-27 |
Attorney, Agent or Firm:
Wakabayashi Tadashi