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Title:
START-UP METHOD OF ULTRA-PURE WATER MANUFACTURING APPARATUS
Document Type and Number:
Japanese Patent JP2017200683
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a start-up method of an ultra-pure water manufacturing apparatus capable of suppressing a hunting phenomenon of the number of particulates after the ultra-pure water manufacturing is started, and stably providing ultra-pure water with an extremely low particulate concentration.SOLUTION: There is provided a start-up method of an ultra-pure water manufacturing apparatus that cleans the inside of an ultra-pure water manufacturing apparatus system prior to supplying the ultra-pure water to a use place in the ultra-pure water manufacturing apparatus for processing primary pure water to manufacture ultra-pure water and supplying it to the use place. Pure water containing hydrogen peroxide or gaseous matter is caused to stagnate or flow in a flow channel of the ultra-pure water manufacturing apparatus, and vibration is applied to at least part of the flow channel from the outside so as to remove particulates adhering to the inner surface of the flow channel.SELECTED DRAWING: Figure 1

Inventors:
AMAMIYA SHINICHIRO
SAKAI NAOYA
SUZUKI NORIHIKO
ABE TOSHIKAZU
Application Number:
JP2016093121A
Publication Date:
November 09, 2017
Filing Date:
May 06, 2016
Export Citation:
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Assignee:
NOMURA MICRO SCIENCE KK
International Classes:
B08B9/032; B01D61/14; B08B3/08; B08B3/10; B08B3/12; B08B7/02; C02F1/44
Domestic Patent References:
JP2002151459A2002-05-24
JPH03288583A1991-12-18
JP2004122020A2004-04-22
JP2014000548A2014-01-09
JP2011088979A2011-05-06
JP2008253373A2008-10-23
JPS62244483A1987-10-24
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office



 
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