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Patent Searching and Data


Title:
STATIC PRESSURE BEARING DEVICE HAVING POSITIONING FUNCTION
Document Type and Number:
Japanese Patent JPH04176530
Kind Code:
A
Abstract:

PURPOSE: To exhibit a required high speed performance with a high economic benefit, by using a motion fluid suitable for a high speed operation and that not suitable for the high speed operation with their changing over as occasion demands.

CONSTITUTION: A pair of static pressure rooms 3, 4 located independently each other at both right and left sides of a guide 1 are formed between the guide 1 and a moving stage 2, and fluid feeding pipelines 7, 8 having valves 5, 6 independent respectively are connected to the static pressure rooms 3, 4. An air source 11 and a helium source 12 are then connected via a changeover valve 13 to this fluid feeding pipelines 7, 8, a static pressure bearing is composed with a static pressure being caused in the static pressure rooms 3, 4 in case of the fluid being fed to the static pressure rooms 3, 4 from which thereof, the moving stage is floated to the guide 1 to enable a high speed movement. Now, a helium source 12 is selected in case of a speed property being necessary, the air source 11 is selected in case of the speed property being not requested.


Inventors:
FUJITA YOSHIJI
NAGANO HIROYUKI
Application Number:
JP30752590A
Publication Date:
June 24, 1992
Filing Date:
November 13, 1990
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G03F9/00; B23Q1/28; B23Q1/38; G03F7/20; H01L21/30; (IPC1-7): B23Q1/28; G03F9/00; H01L21/027
Attorney, Agent or Firm:
Masaru Ishihara