Title:
FORMATION OF FINE THROUGH HOLE ONTO METALLIC THIN SHEET
Document Type and Number:
Japanese Patent JP3149379
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To easily form fine through holes with a desired shape by removing the flaws of resist coating film formed on the circumference of fine recessed parts in a metallic thin sheet by the ejection of a high pressure fluid prior to the coating of an etching resistance layer.
SOLUTION: After the completion of a primary etching stage for a metallic thin sheet 1, prior to a coating stage of an etching resistance layer, parallel to the surface of the metallic thin sheet 1, one or plural high pressure spray nozzles 11 are relatively moved and are allowed to scan the whole face on one side of the metallic thin sheet 1. The jet flow of a fluidized body 12 of cold temp. water or the like is uniformly sprayed over the whole body of one side of the metallic thin sheet 1 to remove the flaws 9 of resist film generated in the circumferential parts of the fine recessed parts 5. This method can be applied even to the case in which slot type pores are formed on the metallic thin sheet 1. By this method, there is no deformation of the metallic thin sheet 1.
More Like This:
| JPS6029636 | [Title of the Invention] Etching processing method |
| JP2005187242 | ETCHING METHOD FOR OPTICAL FIBER |
Inventors:
Keiji Kiriei
Yasuyoshi Miyaji
Masanobu Sato
Akihiro Inagaki
Masashi Sotome
Kouichi Omoto
Yasuyoshi Miyaji
Masanobu Sato
Akihiro Inagaki
Masashi Sotome
Kouichi Omoto
Application Number:
JP4002597A
Publication Date:
March 26, 2001
Filing Date:
February 07, 1997
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
C23F1/00; B26F3/00; H01J9/14; (IPC1-7): C23F1/00; H01J9/14
Domestic Patent References:
| JP61130492A | ||||
| JP5580319A | ||||
| JP5973834A | ||||
| JP5971239A | ||||
| JP63286588A | ||||
| JP1252787A | ||||
| JP222484A |
Other References:
【文献】ウォータージェット、第5巻、第1号、第2~7頁(1988年3月、日本ウォータージェット学会)
Attorney, Agent or Firm:
Takeo Mamiya