PURPOSE: To observe the voltage waveform of LSI having long period with high time resolution, by delaying specific time interval from the long period clock timing synchronous with the clock and controlling the timing for producing the electron beam pulse.
CONSTITUTION: Clock 2 is provided from a pulse generator 1 to pulse counters 7, 27. The counter 27 will receive a frequency division specifying signal 28 from a control computer 8 and provide as LSI clock 4 to LSI driver 3. The counter 7 will count the pulses of clock 2 from the timing of synchronous signal 6 of driver 3 to produce an original delay point signal 10 from the number of clocks set by a clock number specifying signal 9. A high accuracy delay circuit 11 will produce a strobe signal 13 which is formed by delaying the signal 10 through a delay time specifying signal 12 provided from the computor 8 to control a pulse gate deflector 18 through an electron beam pulse width specifying signal 15 provided from the computor 8 and the signal 13. Consequently, the voltage waveform of LSI 5 can be observed with high time resolution.
ISHIZUKA TOSHIHIRO
ITOU AKIO
GOTOU YOSHIAKI
FURUKAWA YASUO
| JPS5848346A | 1983-03-22 |