To enable quantitative evaluation independent of intuition of a worker, great cost reduction required for inspection, and the inspection of a deep defect.
This inspection device includes a light source 6 for irradiating a structure T with an infrared ray having an irradiation wavelength region of 5 μm-20 μm, a motion picture camera 11 for photographing the structure T irradiated with the infrared ray, and an image data processor 18 for forming a temperature distribution image based on the infrared picture photographed by the motion picture camera 11, and detecting a defect part of the structure T based on the temperature distribution image. The subject can be solved by selection of the irradiation wavelength region. It is especially important that a detection wavelength region of proper sensitivity which the motion picture camera 11 has exists in the irradiation wavelength region. The infrared ray having the limited irradiation wavelength region penetrates deeply into the structure and is proper relative to the light-receiving sensitivity of the motion picture camera 11. Therefore, a defect existing deeply in the structure T can be detected. It is furthermore important from the viewpoint of practicality that the detection wavelength region is limited in the range of 8 μm-13 μm.
SERA YOSHIHIRO
HIURA SEIJI
TOMITA FUMIHIRO
KURITA KOICHI
OKAI TAKASHI
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