Title:
基板の洗浄剤
Document Type and Number:
Japanese Patent JP4359754
Kind Code:
B2
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Inventors:
Ikemoto alone
Application Number:
JP2003270625A
Publication Date:
November 04, 2009
Filing Date:
July 03, 2003
Export Citation:
Assignee:
Mitsubishi Gas Chemical Co., Ltd.
International Classes:
G03F7/42; H01L21/304; B08B3/08; C11D7/22; C11D7/32; C11D7/50; H01L21/027
Domestic Patent References:
| JP2002234867A | ||||
| JP2002113431A | ||||
| JP9508163A | ||||
| JP2003510450A |
Attorney, Agent or Firm:
Takashi Nagai