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Title:
Substrate cleaning device
Document Type and Number:
Japanese Patent JP6047359
Kind Code:
B2
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JP3103353Description: A method for cleaning a car air conditioner and an apparatus thereof.
Inventors:
Kazuo Age
Yoshihiko Matsushita
Application Number:
JP2012216729A
Publication Date:
December 21, 2016
Filing Date:
September 28, 2012
Export Citation:
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Assignee:
Screen Holdings Co., Ltd.
International Classes:
B08B3/02; H01L21/304
Domestic Patent References:
JP9213669A
JP2010103383A
JP2009033040A
JP2003057843A
JP8236498A
JP2011071385A
JP2003092284A
Attorney, Agent or Firm:
Takashi Otsubo
Sachiko Muraguchi



 
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