To provide a substrate defect inspection system which is capable of reducing a variation in operator's determination by displaying defect information when a visual inspection is performed.
Defect information conforming to retrieval requirements is read out from defect history data on substrates, and overlaps of every two defect positions selected from the defect information are compared with each other. When an overlap region is found, the region is recorded as overlap information data of the number of overlap l=1. Hereafter, overlap information data as to the whole defect history data are created, furthermore a defect overlap comparison is made between the defect history data and the overlap information data, and as to the overlap regions, overlap information data created by adding 1 to the number of overlaps are created.
| JPH1145919A | 1999-02-16 | |||
| JP2004287532A | 2004-10-14 | |||
| JP2004288743A | 2004-10-14 | |||
| JP2002110754A | 2002-04-12 | |||
| JP2006266766A | 2006-10-05 |
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Tadao Takashiba
Hiroshi Masui
Kiyoshi Kato