To provide a substrate for deposition having high utilization efficiency of a material, and a deposition method having high utilization efficiency of the material by utilizing the substrate for deposition.
The substrate 150 for deposition in which a plurality of regions having different deposition characteristics are formed on the first side of a support substrate 100 is prepared, the material which can be deposited is deposited on the first side of the substrate 150 for deposition, the first side of the substrate 150 for deposition on which the material is deposited and a substrate to be deposited are disposed face to face, and the material may be preferably deposited on a plurality of the substrates to be deposited from one piece of the substrate 150 for deposition by using a plurality of deposition methods corresponding to the different deposition characteristics one by one.
COPYRIGHT: (C)2011,JPO&INPIT
Takuya Tsurume
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