Title:
基板の成膜方法、及び液体吐出ヘッドの製造方法
Document Type and Number:
Japanese Patent JP7146572
Kind Code:
B2
Abstract:
Provided is a method of forming a film on a substrate including: forming a protective member on a surface of the substrate; forming an organic structure on the surface of the substrate, at a distance from the protective member; removing the protective member after the formation of the organic structure; and forming a film by CVD in a region of the surface of the substrate from which the protective member is removed.
Inventors:
Goya Uyama
Sota Takeuchi
Taichi Yonemoto
Kazuaki Shibata
Toyoshi Teranishi
Ken Yasuda
Atsunori Terasaki
Sota Takeuchi
Taichi Yonemoto
Kazuaki Shibata
Toyoshi Teranishi
Ken Yasuda
Atsunori Terasaki
Application Number:
JP2018202746A
Publication Date:
October 04, 2022
Filing Date:
October 29, 2018
Export Citation:
Assignee:
Canon Inc
International Classes:
B41J2/16
Domestic Patent References:
| JP2015020323A | ||||
| JP2017121723A | ||||
| JP2013244654A | ||||
| JP2017213860A | ||||
| JP2003234401A | ||||
| JP2003266395A |
Foreign References:
| US4963501 |
Attorney, Agent or Firm:
Akio Miyazaki
Masaaki Ogata
Masaaki Ogata