Title:
基板保持具、縦型熱処理装置および熱処理方法
Document Type and Number:
Japanese Patent JP5491261
Kind Code:
B2
Inventors:
Naotaka Ogino
Application Number:
JP2010088575A
Publication Date:
May 14, 2014
Filing Date:
April 07, 2010
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/31; H01L21/22; H01L21/324; H01L21/683
Domestic Patent References:
| JP2006080452A | ||||
| JP2005086176A | ||||
| JP2007067334A | ||||
| JP6169010A |
Foreign References:
| WO2008047752A1 |
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanasaka
Noriyuki Kanasaka