SUBSTRATE MANUFACTURING APPARATUS

Japanese Patent JP2005211770

A

To provide a substrate manufacturing apparatus capable of forming a thin film excellent in in-plane film thickness uniformity and capable of suitably adapted to an electronic display device such as an organic EL display device or the like.

In the substrate manufacturing apparatus used in a process for forming the thin film such as an organic layer or the like in an organic EL element by bonding liquid droplets to a substrate from a liquid droplet coating part comprising an ink jet device or the like and irradiating the liquid droplet applied substrate with electromagnetic waves such as infrared rays or the like, the substrate to which the liquid droplet are bonded is successively irradiated with electromagnetic waves.

JP2016195239	SURFACE TREATMENT DEVICE, METHOD OF MANUFACTURING BOARD WITH CONDUCTIVE LAYER, METHOD OF MANUFACTURING SOLAR CELL, AND METHOD OF MANUFACTURING ORGANIC EL DEVICE
WO/2014/057852	COPOLYMER, MATERIAL FOR ORGANIC ELECTRONIC ELEMENT, MATERIAL FOR ORGANIC ELECTROLUMINESCENT ELEMENT, AND ORGANIC ELECTROLUMINESCENT ELEMENT
WO/2013/172040	DISPLAY PANEL AND DISPLAY PANEL MANUFACTURING METHOD

OKAZAKI SHOJI

JP2004020487A

August 11, 2005

January 28, 2004

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SHARP KK

H05B33/10; B05C9/12; H01L21/368; H01L51/50; H05B33/14; (IPC1-7): B05C9/12; H01L21/368; H05B33/10; H05B33/14

JP2004165140A	2004-06-10
JP2003225600A	2003-08-12
JP2003234063A	2003-08-22
JP2005095849A	2005-04-14
JP2005211769A	2005-08-11

WO2002052627A1

2002-07-04

Yasuo Yasutomi
Takanori Tamai
Kazunobu Shigehira

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