Title:
基板の製造方法
Document Type and Number:
Japanese Patent JP4203865
Kind Code:
B1
Inventors:
Takafumi 800
Cho Akira
Cho Akira
Application Number:
JP2008072198A
Publication Date:
January 07, 2009
Filing Date:
March 19, 2008
Export Citation:
Assignee:
Tohoku Techno Arch Co., Ltd.
International Classes:
H01L21/306; C23C16/01; C23C16/04; C23C16/34; C30B25/04; C30B29/38; H01L21/20; H01L21/205; H01L33/00
Domestic Patent References:
| JP2006316307A | ||||
| JP2008078275A |
Foreign References:
| WO2006126330A1 |
Other References:
Jun-Seok Ha et al.,The Fabrication of Vertical Light-Emitting Diodes Using Chemical Lift-Off Process,IEEE PHOTONICS TECHNOLOGY LETTERS,2008年 2月 1日,VOL.20, NO.3,P.175-177
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura