Title:
Substrate processing device
Document Type and Number:
Japanese Patent JP6126505
Kind Code:
B2
Inventors:
Toru Furukawa
Kakuma Hiroaki
Hiroshi Sano
Chichibu Takao
Yukino Shigeno
Kakuma Hiroaki
Hiroshi Sano
Chichibu Takao
Yukino Shigeno
Application Number:
JP2013199351A
Publication Date:
May 10, 2017
Filing Date:
September 26, 2013
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304; B05B1/14; B05C11/00
Domestic Patent References:
| JP5172542A | ||||
| JP10148599A | ||||
| JP201365795A | ||||
| JP8313222A | ||||
| JP2011233569A | ||||
| JP2000229409A | ||||
| JP2011233571A | ||||
| JP2012106148A |
Foreign References:
| WO2008090800A1 |
Attorney, Agent or Firm:
Masahiro Matsusaka
Tsutomu Tanaka
Masamichi Ida
Tsutomu Tanaka
Masamichi Ida