基板の処理装置 - Shibaura Mechatronics Co., Ltd.

Title:

基板の処理装置

Document Type and Number:

Japanese Patent JP4759359

Kind Code:

B2

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Inventors:

Sadaaki Kurokawa

Application Number:

JP2005294614A

Publication Date:

August 31, 2011

Filing Date:

October 07, 2005

Export Citation:

Assignee:

Shibaura Mechatronics Co., Ltd.

International Classes:

H01L21/304; H01L21/306

Domestic Patent References:

Attorney, Agent or Firm:

Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto

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