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Title:
SUBSTRATE TRANSFER DEVICE AND METHOD
Document Type and Number:
Japanese Patent JP2023058000
Kind Code:
A
Abstract:
To provide a substrate transfer device containing a non-contact type driving part.SOLUTION: A substrate processing device contains: a stator assembly containing a driving surface and an electromagnetism generation module; a first mover that floats onto the driving surface and is moved while containing a first magnet module which is opposite to the electromagnetism generation module, and contains a first inclination surface; a second mover that floats onto the driving surface and is moved while containing a second magnetic module which is opposite to the electromagnetism generation module, and contains a second inclination surface; and a transmission member that is arranged between the first mover and the second mover, and is moved along the first and second inclination surfaces in accordance with a distance between the first mover and the second mover.SELECTED DRAWING: Figure 1

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Inventors:
LEE MYUNG JIN
KIM SANG OH
BYUN HEE JAE
LEE NA HYUN
Application Number:
JP2022114568A
Publication Date:
April 24, 2023
Filing Date:
July 19, 2022
Export Citation:
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Assignee:
SEMES CO LTD
International Classes:
H01L21/677; B65G54/02
Domestic Patent References:
JP2021086986A2021-06-03
JP2004363452A2004-12-24
JPH04125248U1992-11-16
JP2020094263A2020-06-18
JP2005142443A2005-06-02
Foreign References:
US20080298947A12008-12-04
KR20120058478A2012-06-07
US20220415688A12022-12-29
Attorney, Agent or Firm:
IBC Ichibancho Patent Attorney Corporation



 
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