To accurately place an LCD substrate, directly, at a position of a substrate-inspecting apparatus, which is actually installed where the LCD substrate is to be placed.

Two displacement detecting sensors 40 and 41 are provided at a substrate-inspecting apparatus 1. Based on the edge position of an LCD substrate 2 detected by the displacement detecting sensors 40 and 41, a displacement amount relative to a position 33b, where the LCD substrate 2 should be placed, is acquired using the substrate-inspecting device 1 actually installed on the LCD substrate 2 being held on a left-side hand 17. Based on the displacement amount, the LCD substrate 2 is applied with a corrective operation of a substrate transfer robot 6, so that it is placed at the position 33b.