Title:
SUBSTRATE TRANSPORT APPARATUS
Document Type and Number:
Japanese Patent JPH0592804
Kind Code:
A
Abstract:
PURPOSE: To provide a substrate transport apparatus which can easily adjust the interval of rollers and smooth the rotation of the rollers.
CONSTITUTION: Brackets 10 having rotary driving means 12, 24, 25, 26 placed thereon and guided by guide rails 8 on a fixed plate 1 is moved by a designated distance by a pair of air cylinders 3 installed on the fixed plate 1 so as to simultaneously adjust the intervals among plural pairs of transport rollers 2, 4.
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| JPS5837848 | [Title of the device] A roller conveyor system with a lifter |
| WO/1983/000680 | MECHANICAL HANDLING APPARATUS |
Inventors:
YAMAZAKI YASUYOSHI
SUGIURA SHUNZO
TANAKA SATORU
SUGIURA SHUNZO
TANAKA SATORU
Application Number:
JP25180691A
Publication Date:
April 16, 1993
Filing Date:
September 30, 1991
Export Citation:
Assignee:
TOSHIBA LIGHTING & TECHNOLOGY
International Classes:
B65G13/12; B65H5/06; H05K13/02; (IPC1-7): B65G13/12; B65H5/06; H05K13/02
Attorney, Agent or Firm:
Takashi Honda
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